8

Low voltage electrowetting-on-dielectric

Year:
2002
Language:
english
File:
PDF, 864 KB
english, 2002
31

Patterning of W/WNx/poly-Si gate electrode using Cl2/O2 plasmas

Year:
2003
Language:
english
File:
PDF, 684 KB
english, 2003
34

A study on the Pt electrode etching for 0.15 μm technologies

Year:
2003
Language:
english
File:
PDF, 1.05 MB
english, 2003